Enhanced descriptions from Syndetics:

The approach taken in this book is to approach vacuum systems from a pressure regime viewpoint. That is, after covering some basic chemistry, the first pressure regime covered is the rough vacuum regime. Within the study of rough vacuum systems, the following topics are covered: the gas load, the pumping mechanism, pressure measurement and vacuum system construction. The discussion of rough vacuum is then followed by the study of high-vacuum systems. The same topics are revisited, but this time from a high vacuum perspective. Once both rough vacuum and high vacuum systems are covered, then the topics of leak detection and residual gas analysis are introduced. This approach lends itself to laboratory experimentation. During the review of gas laws from chemistry, there are a number of experiments and demonstrations that can be performed to reinforce basic laws and concepts. Then, during the study of rough vacuum systems, pumpdown times can be calculated and pumpdowns performed in the laboratory. Likewise, during the study of high-vacuum systems, pumpdowns as well as other lab exercises, such as outgassing and residual gas analysis, can be conducted. Coverage of vacuum systems from a pressure regime viewpoint, rather than from a topical viewpoint. Focus on the fundamental science behind vacumm system components. This book is written for users of vacuum systems, especially the technicians that are responsible for maintaining them.

Table of contents provided by Syndetics

• 1 Much Ado About Vacuum (p. 1)
• 1.1 Introduction (p. 1)
• 1.2 What Is a Vacuum? (p. 2)
• 1.3 Benefits of a Vacuum (p. 3)
• 1.4 Processes That Use a Vacuum (p. 5)
• 1.5 Creating a Vacuum (p. 6)
• 1.6 Looking Ahead (p. 6)
• 2 The Behavior of Gases (p. 9)
• 2.1 Introduction (p. 9)
• 2.2 States of Matter (p. 10)
• 2.3 Kinetic Theory of Gases (p. 12)
• 2.4 Ideal Gas Law (p. 20)
• 2.5 Gas Pressure (p. 22)
• 2.6 Mean Free Path (p. 24)
• 2.7 Adsorption and Desorption (p. 26)
• 2.8 Diffusion and Permeation (p. 27)
• 2.9 Thermal Conductivity (p. 27)
• 2.10 Vapor Pressure (p. 28)
• Summary (p. 30)
• 3 An Introduction to Vacuum Systems (p. 35)
• 3.1 Introduction (p. 35)
• 3.2 Gas Loads (p. 36)
• 3.3 Vacuum Chamber (p. 39)
• 3.4 Vacuum Pumps (p. 39)
• 3.5 Vacuum Gauges (p. 42)
• 3.6 Vacuum System Components (p. 44)
• 3.7 Conductance (p. 46)
• 3.8 A Simple Vacuum System (p. 48)
• 3.9 Characterizing Vacuum Systems (p. 50)
• Summary (p. 51)
• 4 Rough Vacuum Regime (p. 55)
• 4.1 Introduction (p. 55)
• 4.2 Gas Load in the Rough Vacuum Regime (p. 57)
• 4.3 Pumping Down a Rough Vacuum System (p. 58)
• 4.4 Rough Vacuum Pumps (p. 59)
• 4.5 Rough Vacuum Gauges (p. 67)
• 4.6 Valves and Fittings (p. 73)
• 4.7 Rough Vacuum Pump Downs (p. 76)
• 4.8 Conductance (p. 79)
• 4.9 Troubleshooting Rough Vacuum Systems (p. 82)
• Summary (p. 83)
• 5 The High-Vacuum Regime (p. 87)
• 5.1 Introduction (p. 87)
• 5.2 Gas Load in the High-Vaccum Regime (p. 88)
• 5.3 High-Vacuum Systems (p. 90)
• 5.4 High-Vacuum Pumps (p. 92)
• 5.5 High-Vacuum Gauges (p. 101)
• 5.6 Conductance (p. 106)
• 5.7 High-Vacuum Pump Downs (p. 108)
• 5.8 Water in High-Vacuum Systems (p. 111)
• Summary (p. 111)
• 6 Partial Pressure Analysis Using Residual Gas Analyzers (p. 117)
• 6.1 Introduction (p. 117)
• 6.2 Construction and Operation of a Quadrupole RGA (p. 118)
• 6.3 Partial Pressure Measurement (p. 126)
• 6.4 Interpreting Mass Spectra (p. 129)
• 6.5 Uses of a Residual Gas Analyzer (p. 133)
• Summary (p. 137)
• 7 Leak Detection in Vacuum Systems (p. 141)
• 7.1 Introduction (p. 141)
• 7.2 Leak Detection Methods (p. 143)
• 7.3 Helium Mass Spectrometer Leak Detectors (p. 146)
• 7.4 Calibration and Standard Leaks (p. 148)
• 7.5 Selecting a Helium Leak Detector (p. 151)
• 7.6 Using an RGA for Leak Detection (p. 154)
• Summary (p. 155)
• 8 Gas Delivery and Pressure Control (p. 157)
• 8.1 Introduction (p. 157)
• 8.2 Gas Delivery (p. 158)
• 8.3 Mass Flow Controllers (p. 163)
• 8.4 Downstream Pressure Control (p. 173)
• 8.5 Upstream Pressure Control (p. 174)
• Summary (p. 175)
• 9 Safety Issues in Vacuum Systems (p. 177)
• 9.1 Introduction (p. 177)
• 9.2 Electrical Hazards (p. 178)
• 9.3 Mechanical Hazards (p. 179)
• 9.4 Vaccum Hazards (p. 180)
• 9.5 Thermal Hazards (p. 181)
• 9.6 Pressurized Devices (p. 182)
• 9.7 Chemical Hazards (p. 182)
• Summary (p. 183)
• Index (p. 185)